Sains Malaysiana 46(7)(2017): 1155–1161

http://dx.doi.org/10.17576/jsm-2017-4607-19

 

Highly-Sensitive Graphene-based Flexible Pressure Sensor Platform

(Pentas Sensor Tekanan Fleksibel Sensitif Berasaskan Grafin)

 

MUHAMMAD ANIQ SHAZNI, MAI WOON LEE & HING WAH LEE*

 

MIMOS Semiconductor (M) Sdn. Bhd, MIMOS Berhad, Technology Park Malaysia, 57000 Kuala Lumpur, Federal Territory, Malaysia

 

Diserahkan: 5 Januari 2017/Diterima: 6 Mac 2017

 

ABSTRACT

In this work, graphene has been utilized as the sensing material for the development of a highly-sensitive flexible pressure sensor platform. It has been demonstrated that a graphene-based pressure sensor platform that is able to measure pressure change of up to 3 psi with a sensitivity of 0.042 psi-1 and a non-linearity of less than 1% has been accomplished. The developed device, which resides on a flexible platform, will be applicable for integration in continuous wearables health-care monitoring system for the measurement of blood pressure.

 

Keywords: Chemical vapor deposition (CVD); flexible; graphene; interdigitated electrodes (IDE); pressure sensor; wearables

 

ABSTRAK

Dalam kajian ini, grafin telah digunakan sebagai bahan penderiaan untuk pembangunan pentas fleksibel untuk penderia tekanan darah yang sangat sensitif. Ia telah dibuktikan bahawa sebuah pentas penderia tekanan yang berasaskan grafin berupaya untuk mencapai pengukuran perubahan tekanan sehingga 3 psi dengan kepekaan 0.042 psi-1 dan ketidak-linearan yang kurang daripada 1%. Penderia yang telah dibangunkan ini sesuai untuk digunakan dalam sistem boleh guna pemantauan tekananan darah secara berterusan bagi industri penjagaan kesihatan.

 

Kata kunci: Boleh guna; elektrod interdigit (IDE); fleksibel; grafin; pemendapan wap kimia (CVD); penderia tekanan

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*Pengarang untuk surat-menyurat; email: hingwah.lee@mimos.my