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Piezoelectric
Micropump with Nanoliter Per Minute Flow for Drug Delivery Systems
(Pam Mikro
Piezoelekrik dengan Aliran Nanoliter Seminit untuk Sistem Penghantaran Bendalir
Ubat)
Juliana Johari, Jumril Yunas, Azrul Azlan Hamzah
& Burhanuddin Yeop Majlis*
Institute of Microengineering and Nanoelectronics (IMEN)
Universiti Kebangsaan Malaysia, 43600 UKM Bangi, Selangor D.E., Malaysia
Received: 15 May 2010 / Accepted: 3 September 2010
ABSTRACT
A Piezoelectric Actuated
Valveless Micropump (PAVM) has been designed and
successfully fabricated using MEMS fabrication processes. The
micropump uses a PZT: Pb(ZrTi)Ox ceramic
plate to actuate a silicon membrane which bends when a voltage is applied to
the piezoelectric actuator. The resultant reciprocating movement of the pump
membrane is then converted into pumping effect. By integrating dynamic passive
valves into the device, the pump would then operate continuously with
volumetric pumping rate determined by the frequency of the driving voltage.
Simulation work to determine the micropump fluidic characteristics was
performed using CoventorWare MemFSI™ module. The pump was fabricated on a
double side polished silicon wafer via simple two-mask micromachining process.
The fabricated micropump, having an outer dimension of 14 mm × 14 mm × 2 mm,
was then tested with DI (deionized) water as the test
liquid. A driving voltage of 16 Vpp was applied to the PZT actuator.
Pump rate of 4.98 nL per min was obtained at 0.673 kHz. The fabricated
micropump envisages a promising pumping method to be implemented into drug
delivery systems.
Keywords: CoventorWare
MemFSI; drug delivery; MEMS; PAVM;
piezoelectric micropump
ABSTRAK
Pam mikro Janaan
Piezoelektrik Tanpa Injap (PAVM) telah direka bentuk dan berjaya
difabrikasi melalui proses fabrikasi MEMS. Pam mikro ini menggunakan
plat seramik PZT: Pb(ZrTi)Ox untuk menggerakkan membran silikon
yang membengkok bila voltan dikenakan pada penggerak piezoelektrik. Pergerakan
salingan yang terhasil pada membran pam kemudiannya diterjemahkan kepada kesan
pengepaman. Dengan mengintegrasikan injap-injap pasif dinamik kepada peranti,
pam ini boleh beroperasi tanpa henti dengan kadar pengepaman ditentukan oleh
frekuensi voltan pemacu. Analisis simulasi untuk menetukan ciri-ciri aliran pam
mikro tersebut telah dilakukan dengan menggunakan modul MemFSI™ CoventorWare.
Pam tersebut kemudiannya difabrikasi di atas wafer silikon dengan kedua-dua
permukaan licin melalui proses pemesinan mikro dwi-topeng mudah. Pam mikro
tersebut, yang bersaiz 14 mm × 14 mm × 2 mm, kemudiannya diuji menggunakan air
ternyah ion sebagai cecair uji. Voltan pemacu 16 Vpp telah
dikenakan pada penggerak PZT. Kadar pengepaman 4.98 nL seminit
telah dicapai pada 0.673 kHz. Pam mikro ini mencetus satu kaedah pengepaman
yang berpotensi digunapakai dalam sistem penghantaran bendalir ubat.
Kata kunci:
CoventorWare MemFSI; MEMS; pam mikro piezoelektrik; PAVM; penghantaran bendalir ubat
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*Corresponding
author; email: burhan@vlsi.eng.ukm.my
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